United LED selects Veeco’s MOCVD tools to ramp LED manufacturing

PLAINVIEW, USA: Veeco Instruments Inc. announced that United LED Shan Dong Corp., (ULED) a China-based joint venture between United Microelectronics Corp. (UMC) and Epistar, has placed a multi-tool order for Veeco’s TurboDisc K465i Metal Organic Chemical Vapor Deposition (MOCVD) Systems. The systems will be installed at ULED’s facility in Jining City, China for its high brightness light emitting diode (HB LED) manufacturing ramp.

Dr. Tzu-Chi Wen, VP, Epi factory of United LED, commented: “We are pleased to add Veeco systems to our production facility because of their demonstrated leadership in MOCVD technology. The K465i provides the process performance and lowest cost of ownership needed to advance ULED’s position as a provider of LED devices for various lighting applications.”

Bill Miller, Ph.D., executive VP, Compound Semiconductor and head of Veeco's MOCVD Operations commented: “We are delighted that United LED has chosen Veeco’s K465i systems for their manufacturing ramp. Our systems offer key advantages, including highest capital efficiency and excellent yields, which will help establish ULED as a leader in the growing China market.”

With superior uniformity and excellent run-to-run repeatability, the production-proven K465i extends Veeco's lead in capital efficiency - the number of good wafers per day for each capital dollar - for high volume LED manufacturers. The K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance.