Epistar places multi-tool order for Veeco MOCVD systems

PLAINVIEW, USA: Veeco Instruments Inc. announced that Epistar Corp., headquartered in Taiwan, has placed a multi-tool order for Veeco’s TurboDisc K465i gallium nitride (GaN) Metal Organic Chemical Vapor Deposition (MOCVD) systems for high volume light emitting diode (LED) production.

Dr. M.J. Jou, president of Epistar, commented, “Since we qualified Veeco’s tools for production back in May, we have been extremely satisfied with their performance. Given the systems’ ease-of-use and low cost of ownership, we now plan to include Veeco as an important supplier to Epistar.”

Bill Miller, Ph.D., executive VP, Compound Semiconductor and head of Veeco’s MOCVD Operations commented, “We are excited to continue to establish this strong relationship with Epistar in 2010, and pleased to support their current and future MOCVD requirements.”

With superior wavelength uniformity and excellent run-to-run repeatability, the production-proven K465i extends Veeco’s lead in capital efficiency – the number of good wafers per day for each capital dollar – for high volume LED manufacturers. The K465i provides ease-of-tuning for fast process optimization on wafer sizes up to 8 inches and fast tool recovery time after maintenance.